Advanced inspection and metrology system providing true infrared imaging for subsurface crack detection on silicon and 3D metrology capability for precision measurements maximizing inspection yield. Artificial Intelligence algorithms enable pattern recognition and precise defect classification.
- Aquilae HR Sidewall: Micro-scale visible defect inspection down to 5 µm
- Aquilae Infrared: Inner cracks detection on silicon devices
- 3D Flex® Vision: True 3D inspection for Balls/Bumps
Handler and Inspection Availability
- Delta Eclipse pick-and-place
- Delta MATRiX pick-and-place
- Ismeca NY20 turret test and scan and package inspection
- Ismeca NY32 turret test and scan and package inspection
- Ismeca NY32W KGD and LED
- Rasco Jaguar high parallel
- Neon Inspection
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