Sensors and MEMS Test

Modular design based on standard handlers, high parallelism, ambient to automotive tri-temp handling

Cohu MEMS solutions combine the advantages of well established and production proven tri-temp test handling equipment with innovative concepts to meet the special requirements of the MEMS market.

The modular design concept allows greatest flexibility for our customers as it allows ease of conversion between stimulus types. This flexibility and modularity provides the customers with the advantage of being able to react fast to the market changes and provides the best return on investment.

Cohu MEMS modules are available for a variety of sensor test applications, for singulated devices in various input media and also the unique and cost-efficient strip test in carriers, allowing the highest test parallelism in the market, and thus reducing the customers cost of test.

Key Features
  • Easy docking and undocking of the MEMS modules to the standard test handler whether Gravity, Pick and Place or Test in Strip
  • Test in the complete tri-temp range for ambient, hot and cold (automotive certified)
  • Easily convertible to other packages
  • Downscaled stand-alone engineering set-up available
  • Global support by experienced Cohu Field Service and Applications staff

Solution by Sensor Type

Accelerometer

Accelerometers MEMS Test Module

Test of Singulated Acelerometers

Accelerometers MEMS strip-test module can operate in a standalone mode in an engineering bench setup, MEMS Test Cart is equipped with two independent MEMS test modules (Shakers) for manual loading/unloading.  It can be configured with a Cohu MT9928 tri-temp test handler for automatic loading / unloading.

The module with MT9928 test handler supports tests over the –40°C to +140°C temperature range. It can handle leaded devices 150 mil to 300 mil and leadless devices 3 mm to 11 mm. Index time is 2.2 s for any package.

InFlip MEMS Strip Module

High Parallel Test of Inertial Sensors up to 6DOF

InFlip MEMS strip-test module incorporates a modular architecture designed to replace expensive custom-designed machinery. It can operate in a standalone mode or it can be configured with a Cohu InStrip platform for full automation.

InGyro Test Module

High Parallel Test of Inertial Sensors up to 9DOF

The InGyro sensor test module and functional test program for physical stimulation of inertial sensors under temperature conditions supports multiple target applications: accelerometers, gyroscopes, as well as multi-axis IMU’s (inertial measurement units) up to 9DOF (Degrees of Freedom). To meet the requirements of automotive and other demanding applications the temperature range the InGyro module supports testing at temperatures from -40°C to +125°C.

Acoustic

Rasco MEMS

Magnetic, Pressure, Optical and Acoustic Sensors

Rasco MEMS portfolio offers flexible, high parallelism units to address the cost-sensitive requirements for testing MEMS devices. The modular design provide for quick and easy integration on Gravity, Test-in-Strip or Pick and Place test handlers for testing MEMS ICs up to 32 devices in parallel.

  • Acoustic Test Unit (ATC) for testing audio devices
  • Magnetic Test Unit (MTU) for testing geomagnetic sensors
  • Optical Test Unit (OTU) for testing LED and light sensors
  • Pressure Test Unit (PUT) for high accuracy testing of integrated pressure sensors

Barometric

InBaro Module

High Parallel Test of Barometric Pressure Sensors

InBaro provides a reliable multisite test and calibration solution for barometric pressure sensors e.g. 144 and more devices in parallel with a maximum signal count of 2400 pins per insertion. It enables temperature test at a range from -40°C up to +125°C with best temperature accuracy and stability. The InBaro standard configuration supports quick exchange between five pressure levels – more can be added on request. InBaro features absolute pressures up to 1,500 mbar. The InBaro can be upgraded to “InHumid” and “Gas” to expand the application to other environmental sensor devices.

InHumid Module

High Parallel Test of Environmental Sensors

InHumid sensor test system for final test of environmental sensors allows for high volume single-insertion test and calibration of integrated environmental sensors measuring pressure, temperature, humidity and gas.

InHumid is an optional upgrade Cohu’s InBaro module, adding humidity and gas test to the barometric test capability provided by InBaro. The physical structures to apply humid air or gas flow to the DUT reside inside the conversion kit. This architecture facilitates easy upgrading in the field. For testing the gas element of environmental sensors InHumid can be extended by a gas option. This option provides the measures needed to operate the machine in a safe manner when testing typical environmental, gases traced in air quality monitoring, or personal fitness applications (e.g. connections to attach to a general exhaust system).

The InHumid solution fully leverages the temperature capabilities and proven high volume performance of the InBaro/InStrip set-up. Like with InBaro, InHumid can be used in a Cohu InCarrier set up to support reliable and robust test handling of small MEMS packages, which are typical for environmental sensors in consumer applications.

Gas

InBaro Module

High Parallel Test of Barometric Pressure Sensors

InBaro provides a reliable multisite test and calibration solution for barometric pressure sensors e.g. 144 and more devices in parallel with a maximum signal count of 2400 pins per insertion. It enables temperature test at a range from -40°C up to +125°C with best temperature accuracy and stability. The InBaro standard configuration supports quick exchange between five pressure levels – more can be added on request. InBaro features absolute pressures up to 1,500 mbar. The InBaro can be upgraded to “InHumid” and “Gas” to expand the application to other environmental sensor devices.

InHumid Module

High Parallel Test of Environmental Sensors

InHumid sensor test system for final test of environmental sensors allows for high volume single-insertion test and calibration of integrated environmental sensors measuring pressure, temperature, humidity and gas.

InHumid is an optional upgrade Cohu’s InBaro module, adding humidity and gas test to the barometric test capability provided by InBaro. The physical structures to apply humid air or gas flow to the DUT reside inside the conversion kit. This architecture facilitates easy upgrading in the field. For testing the gas element of environmental sensors InHumid can be extended by a gas option. This option provides the measures needed to operate the machine in a safe manner when testing typical environmental, gases traced in air quality monitoring, or personal fitness applications (e.g. connections to attach to a general exhaust system).

The InHumid solution fully leverages the temperature capabilities and proven high volume performance of the InBaro/InStrip set-up. Like with InBaro, InHumid can be used in a Cohu InCarrier set up to support reliable and robust test handling of small MEMS packages, which are typical for environmental sensors in consumer applications.

Gyroscopes

InGyro Test Module

High Parallel Test of Inertial Sensors up to 9DOF

The InGyro sensor test module and functional test program for physical stimulation of inertial sensors under temperature conditions supports multiple target applications: accelerometers, gyroscopes, as well as multi-axis IMU’s (inertial measurement units) up to 9DOF (Degrees of Freedom). To meet the requirements of automotive and other demanding applications the temperature range the InGyro module supports testing at temperatures from -40°C to +125°C.

The modular InGyro Test Call can be reconfigured for multiple sensor types and will also be used for accelerometer test. It combines high stimulus and temperature accuracy for engineering characterization and development with high parallelism for volume production.

Humidity

InBaro Module

High Parallel Test of Barometric Pressure Sensors

InBaro provides a reliable multisite test and calibration solution for barometric pressure sensors e.g. 144 and more devices in parallel with a maximum signal count of 2400 pins per insertion. It enables temperature test at a range from -40°C up to +125°C with best temperature accuracy and stability. The InBaro standard configuration supports quick exchange between five pressure levels – more can be added on request. InBaro features absolute pressures up to 1,500 mbar. The InBaro can be upgraded to “InHumid” and “Gas” to expand the application to other environmental sensor devices.

InHumid Module

High Parallel Test of Environmental Sensors

InHumid sensor test system for final test of environmental sensors allows for high volume single-insertion test and calibration of integrated environmental sensors measuring pressure, temperature, humidity and gas.

InHumid is an optional upgrade Cohu’s InBaro module, adding humidity and gas test to the barometric test capability provided by InBaro. The physical structures to apply humid air or gas flow to the DUT reside inside the conversion kit. This architecture facilitates easy upgrading in the field. For testing the gas element of environmental sensors InHumid can be extended by a gas option. This option provides the measures needed to operate the machine in a safe manner when testing typical environmental, gases traced in air quality monitoring, or personal fitness applications (e.g. connections to attach to a general exhaust system).

The InHumid solution fully leverages the temperature capabilities and proven high volume performance of the InBaro/InStrip set-up. Like with InBaro, InHumid can be used in a Cohu InCarrier set up to support reliable and robust test handling of small MEMS packages, which are typical for environmental sensors in consumer applications.

Magnetic

Rasco MEMS

Magnetic, Pressure, Optical and Acoustic Sensors

Rasco MEMS portfolio offers flexible, high parallelism units to address the cost-sensitive requirements for testing MEMS devices. The modular design provide for quick and easy integration on Gravity, Test-in-Strip or Pick and Place test handlers for testing MEMS ICs up to 32 devices in parallel.

  • Acoustic Test Unit (ATC) for testing audio devices
  • Magnetic Test Unit (MTU) for testing geomagnetic sensors
  • Optical Test Unit (OTU) for testing LED and light sensors
  • Pressure Test Unit (PUT) for high accuracy testing of integrated pressure sensors

Magnetometer

InFlip MEMS Strip Module

High Parallel Test of Inertial Sensors up to 6DOF

InFlip MEMS strip-test module incorporates a modular architecture designed to replace expensive custom-designed machinery. It can operate in a standalone mode or it can be configured with a Cohu InStrip platform for full automation.

Optical

Rasco MEMS

Magnetic, Pressure, Optical and Acoustic Sensors

Rasco MEMS portfolio offers flexible, high parallelism units to address the cost-sensitive requirements for testing MEMS devices. The modular design provide for quick and easy integration on Gravity, Test-in-Strip or Pick and Place test handlers for testing MEMS ICs up to 32 devices in parallel.

  • Acoustic Test Unit (ATC) for testing audio devices
  • Magnetic Test Unit (MTU) for testing geomagnetic sensors
  • Optical Test Unit (OTU) for testing LED and light sensors
  • Pressure Test Unit (PUT) for high accuracy testing of integrated pressure sensors

Pressure

InPressure HD Test Module

High Parallel Test of TPMS and Pressure Sensors

InPressure HD module for high pin count pressure test up to 16 bar and fully supports high multi-site test of high pin count devices with up to 2,268 signal lines.

It can operate in a standalone mode  or it can be configured with a Cohu InStrip platform for full automation.

The InPressure HD module can handle strip sizes. It supports tests over the –40°C to +125°C temperature range. Contact index time 6 s, strip/carrier exchange time 12 s.

Rasco MEMS

Magnetic, Pressure, Optical and Acoustic Sensors

Rasco MEMS portfolio offers flexible, high parallelism units to address the cost-sensitive requirements for testing MEMS devices. The modular design provide for quick and easy integration on Gravity, Test-in-Strip or Pick and Place test handlers for testing MEMS ICs up to 32 devices in parallel.

  • Acoustic Test Unit (ATC) for testing audio devices
  • Magnetic Test Unit (MTU) for testing geomagnetic sensors
  • Optical Test Unit (OTU) for testing LED and light sensors
  • Pressure Test Unit (PUT) for high accuracy testing of integrated pressure sensors

Cohu MEMS Solution

MEMS Test Cell

Pre-validated Test Cells delivering fast ramp to production yield and throughput

Cohu has delivered more than 20 complete test cells to IDMs and OSATs in Asia, Europe and North America to address next generation device test requirements and supplement existing production capacity.

  • Inertial Sensor Test Cells
  • Environmental Test Cells
  • Microphone Test Cells

Cohu is the only company with the expertise on the entire test cell and inspection and is recognized for its industry-leading suite of flexible and cost-effective MEMS test cell offerings. We work in close cooperation with our customers and leverage the cross functional expertise of Cohu’s product teams; Semiconductor ATE, Test handler and Interface solutions.

Cohu provides a full pre-validated service within our facilities, to ensure that start up time at the customer site is minimized and target production yield and throughput are achieved in the fastest possible time.

InBaro Module

High Parallel Test of Barometric Pressure Sensors

InBaro provides a reliable multisite test and calibration solution for barometric pressure sensors e.g. 144 and more devices in parallel with a maximum signal count of 2400 pins per insertion. It enables temperature test at a range from -40°C up to +125°C with best temperature accuracy and stability. The InBaro standard configuration supports quick exchange between five pressure levels – more can be added on request. InBaro features absolute pressures up to 1,500 mbar. The InBaro can be upgraded to “InHumid” and “Gas” to expand the application to other environmental sensor devices.

InFlip MEMS Strip Module

High Parallel Test of Inertial Sensors up to 6DOF

InFlip MEMS strip-test module incorporates a modular architecture designed to replace expensive custom-designed machinery. It can operate in a standalone mode or it can be configured with a Cohu InStrip platform for full automation.

InGyro Test Module

High Parallel Test of Inertial Sensors up to 9DOF

The InGyro sensor test module and functional test program for physical stimulation of inertial sensors under temperature conditions supports multiple target applications: accelerometers, gyroscopes, as well as multi-axis IMU’s (inertial measurement units) up to 9DOF (Degrees of Freedom). To meet the requirements of automotive and other demanding applications the temperature range the InGyro module supports testing at temperatures from -40°C to +125°C.

InHumid Module

High Parallel Test of Environmental Sensors

InHumid sensor test system for final test of environmental sensors allows for high volume single-insertion test and calibration of integrated environmental sensors measuring pressure, temperature, humidity and gas.

InHumid is an optional upgrade Cohu’s InBaro module, adding humidity and gas test to the barometric test capability provided by InBaro. The physical structures to apply humid air or gas flow to the DUT reside inside the conversion kit. This architecture facilitates easy upgrading in the field. For testing the gas element of environmental sensors InHumid can be extended by a gas option. This option provides the measures needed to operate the machine in a safe manner when testing typical environmental, gases traced in air quality monitoring, or personal fitness applications (e.g. connections to attach to a general exhaust system).

The InHumid solution fully leverages the temperature capabilities and proven high volume performance of the InBaro/InStrip set-up. Like with InBaro, InHumid can be used in a Cohu InCarrier set up to support reliable and robust test handling of small MEMS packages, which are typical for environmental sensors in consumer applications.

InPressure HD Test Module

High Parallel Test of TPMS and Pressure Sensors

InPressure HD module for high pin count pressure test up to 16 bar and fully supports high multi-site test of high pin count devices with up to 2,268 signal lines.

It can operate in a standalone mode  or it can be configured with a Cohu InStrip platform for full automation.

The InPressure HD module can handle strip sizes. It supports tests over the –40°C to +125°C temperature range. Contact index time 6 s, strip/carrier exchange time 12 s.

Rasco MEMS

Magnetic, Pressure, Optical and Acoustic Sensors

Rasco MEMS portfolio offers flexible, high parallelism units to address the cost-sensitive requirements for testing MEMS devices. The modular design provide for quick and easy integration on Gravity, Test-in-Strip or Pick and Place test handlers for testing MEMS ICs up to 32 devices in parallel.

  • Acoustic Test Unit (ATC) for testing audio devices
  • Magnetic Test Unit (MTU) for testing geomagnetic sensors
  • Optical Test Unit (OTU) for testing LED and light sensors
  • Pressure Test Unit (PUT) for high accuracy testing of integrated pressure sensors